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Surface and Coatings Technology

Volumn 183, Issue 1, 2004, Pages 45-50

Influence of nitrogen on the structure and mechanical properties of r.f.-sputtered Cr-B-N thin films

(3) Zhou, Min a Nose, M b Nogi, K a

a OSAKA UNIVERSITY (Japan)

b UNIVERSITY OF TOYAMA (Japan)

Author keywords

Chromium boron nitrides; Nitrogen partial pressure; R.f. plasma assisted magnetron sputtering; Thin film

Indexed keywords

HARDNESS; MAGNETRON SPUTTERING; PARTIAL PRESSURE; PHASE TRANSITIONS; SYNTHESIS (CHEMICAL); THIN FILMS; X RAY DIFFRACTION ANALYSIS;

ANTI-OXIDATION PROPERTIES; NITROGEN PARTIAL PRESSURE; SPUTTERED FILMS;

CHROMIUM COMPOUNDS;

SPUTTERING;

EID: 2342418623 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2003.09.064 Document Type: Article

Times cited : (25)

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