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Volumn 445, Issue 1, 2003, Pages 96-104
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Physical and mechanical properties of reactively sputtered chromium boron nitride thin films
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Author keywords
CrBN; Ellipsometry; Hard coatings; Protective coatings
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
CHROMIUM;
CUBIC BORON NITRIDE;
ELLIPSOMETRY;
INDENTATION;
NITROGEN;
PROTECTIVE COATINGS;
SPUTTERING;
X RAY PHOTOELECTRON SPECTROSCOPY;
HARD COATINGS;
THIN FILMS;
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EID: 0242486388
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(03)01189-1 Document Type: Article |
Times cited : (28)
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References (19)
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