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Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 444-449

Structure and properties of Cr-B, Cr-B-N and multilayer Cr-B/Cr-B-N thin films prepared by r.f.-sputtering

(6) Sakamaoto, Y a Nose, M b Mae, T a Honbo, E c Zhou, M a,d Nogi, K d

a TOYAMA NATIONAL COLLEGE OF TECHNOLOGY (Japan)

b UNIVERSITY OF TOYAMA (Japan)

c TOYAMA INDUSTRIAL TECHNOLOGY CENTER (Japan)

d OSAKA UNIVERSITY (Japan)

Author keywords

Chromium boron nitride; Multilayer; Nano indentation; Sputtering; X Ray diffraction; X Ray photoelectron spectroscopy

Indexed keywords

ELASTIC MODULI; MAGNETRON SPUTTERING; MULTILAYERS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

MULTILAYER COATINGS;

CHROMIUM COMPOUNDS;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 0041326729 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(03)00697-2 Document Type: Article

Times cited : (40)

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