MEMS post-processing of MPW dies using BSOI carrier wafers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6882, Issue , 2008, Pages

  Mukherjee, A Goswami ^a   Kiziroglou, M E ^a   Holmes, A S ^a   Yeatman, E M ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

BSOI; CMOS; Die carrier; DRIE; MEMS

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTROPLATING; INTEGRATED CIRCUITS; PHOTORESISTS; SILICON ON INSULATOR TECHNOLOGY; SPIN COATING;

DIE CARRIERS; ELECTRONIC CIRCUIT DESIGNS; MULTI-PROJECT-WAFER (MPW) SERVICES;

MEMS;

EID: 41149101558     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.763217     Document Type: Conference Paper

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