Nanoindentation response of a thin InP membrane

Journal of Physics D: Applied Physics

Volumn 41, Issue 7, 2008, Pages

  Le Bourhis, E ^a   Patriarche, G ^b  

^a UNIVERSITÉ DE POITIERS   (France)

^b UNIV PARIS SUD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

INDIUM COMPOUNDS; MICROFABRICATION; NANOINDENTATION; PHOTOLITHOGRAPHY; TRANSMISSION ELECTRON MICROSCOPY;

NANOINDENTATION RESPONSE; THIN INP MEMBRANE;

MEMBRANES;

EID: 41149099118     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/7/074003     Document Type: Article

References (16)

1. Uchic M D, Dimiduk D M, Florando J N and Nix W D 2004 Science 305 986
2. Le Bourhis E and Patriarche G 2003 Prog. Cryst. Growth Charact. Mater. 47 1
3. Johnson K L 1985 Contact Mechanics (Cambridge: Cambridge University Press)
4. Choi Y and Suresh S 2003 Scr. Mater. 48 249
5. Largeau L, Patriarche G, Le Bourhis E, Rivière A and Rivière J P 2003 Phil. Mag. 83 1653
6. Patriarche G, Largeau L, Rivière J P and Le Bourhis E 2005 J. Phys. D: Appl. Phys. 38 1140
7. Le Bourhis E and Patriarche G 2005 Acta Mater. 53 1907
8. Le Bourhis E and Patriarche G 2005 Appl. Phys. Lett. 86 163107
9. Michler J, Wasmer K, Meier S, stlund F and Leifer K 2007 Appl. Phys. Lett. 90 043123
10. Oliver W C and Pharr G M 1992 J. Mater. Res. 7 1564
11. Marshall D B and Evans A G 1984 J. Appl. Phys. 56 2632
12. Chalker P R, Bull S J and Rickerby D S 1991 Mater. Sci. Eng. A 140 583
13. Volinsky A A, Moody N R and Gerberich W W 2002 Acta Mater. 50 441
14. Harvey S, Huang H, Venkataraman S and Gerberich W W 1993 J. Mater. Res. 8 1291
15. Kramer D, Huang H, Kriese M, Robach J, Nelson J, Wright A, Bahr D and Gerberich W W 1999 Acta Mater. 47 333
16. Patriarche G and Le Bourhis E 2002 Phil. Mag. 82 1953