Nanoindentation response of a single micrometer-sized GaAs wall

Applied Physics Letters

Volumn 86, Issue 16, 2005, Pages 1-3

  Le Bourhis, E ^a,b   Patriarche, G ^b  

^a UNIVERSITÉ DE POITIERS   (France)

^b UNIV PARIS SUD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MICROMETERS; OPTOELECTRONIC DEVICES; PHOTOLITHOGRAPHY; PLASTIC DEFORMATION; STIFFNESS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

CONTACT STIFFNESS; MISMATCHED LAYERS; NANOINDENTATION; RESIDUAL DISLOCATIONS;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 20844461828     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1904711     Document Type: Article

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