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Volumn 53, Issue 7, 2005, Pages 1907-1912
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Mechanical response of wall-patterned GaAs surface
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Author keywords
Compound semiconductors; Nanoindentation; Transmission electron microscopy; Yield phenomena
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Indexed keywords
ASPECT RATIO;
DRY ETCHING;
INDENTATION;
PHOTOLITHOGRAPHY;
STIFFNESS;
SURFACE CHEMISTRY;
TRANSMISSION ELECTRON MICROSCOPY;
COMPOUND SEMICONDUCTORS;
MECHANICAL RESPONSE;
NANOINDENTATION;
YIELD PHENOMENA;
SEMICONDUCTING GALLIUM ARSENIDE;
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EID: 14544305478
PISSN: 13596454
EISSN: None
Source Type: Journal
DOI: 10.1016/j.actamat.2005.01.001 Document Type: Article |
Times cited : (12)
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References (15)
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