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Volumn 53, Issue 7, 2005, Pages 1907-1912

Mechanical response of wall-patterned GaAs surface

Author keywords

Compound semiconductors; Nanoindentation; Transmission electron microscopy; Yield phenomena

Indexed keywords

ASPECT RATIO; DRY ETCHING; INDENTATION; PHOTOLITHOGRAPHY; STIFFNESS; SURFACE CHEMISTRY; TRANSMISSION ELECTRON MICROSCOPY;

EID: 14544305478     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2005.01.001     Document Type: Article
Times cited : (12)

References (15)
  • 3
    • 85040875608 scopus 로고
    • Cambridge University Press Cambridge
    • K.L. Johnson Contact mechanics 1985 Cambridge University Press Cambridge
    • (1985) Contact Mechanics
    • Johnson, K.L.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.