Fabrication of biochips with micro fluidic channels by micro end-milling and powder blasting

Sensors

Volumn 8, Issue 2, 2008, Pages 1308-1320

  Yun, Dae Jin ^a   Seo, Tae Il ^a   Park, Dong Sam ^a  

^a SolarLight Ltd   (South Korea)

Author keywords

Biochip; Deburring; Micro end milling; Micro fluidic channel; Powder blasting

Indexed keywords

BIOASSAY; BIOCHIPS; BLASTING; CUTTING; DEBURRING; FABRICATION; MACHINE TOOLS; MEMS; MICROANALYSIS; MICROARRAYS; MICROFABRICATION; MICROMACHINING; MILLING (MACHINING); MOLDS; PHOTORESISTS; POWDER METALS;

MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICRO END MILLING; MICRO HOT EMBOSSING; MICRO-FABRICATION TECHNIQUES; MICRO-FABRICATION TECHNOLOGY; MICRO-INJECTION MOLDING; MICROFLUIDIC CHANNEL; POWDER BLASTINGS;

FLUIDIC DEVICES;

EID: 40849142613     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s8021308     Document Type: Article

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