SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Applied Electrochemistry

Volumn 38, Issue 4, 2008, Pages 457-468

An investigation of copper interconnect deposition bath ageing by electrochemical impedance spectroscopy

(5) Gabrielli, C a Mocoteguy P a Perrot, H a Nieto Sanz, D b Zdunek, A c

a SORBONNE UNIVERSITÉ (France)

b AIR LIQUIDE (France)

c Chicago Research Center Inc (United States)

Author keywords

Ageing; Copper; Damascene process; Electrodeposition; Impedance; Microelectronics

Indexed keywords

ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; ELECTRODEPOSITION; EQUIVALENT CIRCUITS; MICROELECTRONICS;

COPPER INTERCONNECT PLATING BATHS; DAMASCENE PROCESS;

COPPER;

EID: 40849113532 PISSN: 0021891X EISSN: None Source Type: Journal
DOI: 10.1007/s10800-007-9459-1 Document Type: Article

Times cited : (24)

References (20)

1
- 0035323468
- Moffat TP, Wheeler D, Huber WH, Josell D (2001) Electrochem Solid State Lett 4:C26
- (2001) Electrochem Solid State Lett , vol.4 , pp. 26
- Moffat, T.P.¹ Wheeler, D.² Huber, W.H.³ Josell, D.⁴

2
- 0035545618
- Koh LT, You GZ, Lim SY, Lim CY, Foo PD (2001) Microelectronics J 32:973
- (2001) Microelectronics J , vol.32 , pp. 973
- Koh, L.T.¹ You, G.Z.² Lim, S.Y.³ Lim, C.Y.⁴ Foo, P.D.⁵

3
- 0344975228
- Epelboin I, Lenoir F, Wiart R (1972) J Cryst Growth 13:417
- (1972) J Cryst Growth , vol.13 , pp. 417
- Epelboin, I.¹ Lenoir, F.² Wiart, R.³

4
- 0000600075
- Burrows IR, Harrison JA, Thomson J (1975) J Electroanal Chem 58:241
- (1975) J Electroanal Chem , vol.58 , pp. 241
- Burrows, I.R.¹ Harrison, J.A.² Thomson, J.³

5
- 33845235487
- Razumney G, O'M Bockris J (1973) J Electroanal Chem 46:185
- (1973) J Electroanal Chem , vol.46 , pp. 185
- Razumney, G.¹ Bockris O'M, J.²

6
- 0001939252
- Bard AJ (ed). Marcel Dekker, New York
- Harrison JA, Thirsk HR (1971) In: Bard AJ (ed) Electroanalytical chemistry, vol 5. Marcel Dekker, New York, p 67
- (1971) Electroanalytical Chemistry , vol.5 , pp. 67
- Harrison, J.A.¹ Thirsk, H.R.²

7
- 0021423923
- Chassaing E, Wiart R (1984) Electrochim Acta 29:649
- (1984) Electrochim Acta , vol.29 , pp. 649
- Chassaing, E.¹ Wiart, R.²

8
- 0037031494
- Soares DM, Wasle S, Weil KG, Doblhofer K (2002) J Electroanal Chem 532:353
- (2002) J Electroanal Chem , vol.532 , pp. 353
- Soares, D.M.¹ Wasle, S.² Weil, K.G.³ Doblhofer, K.⁴

9
- 18344382063
- Healy JP, Pletcher D, Goodenough M (1992) J Electronal Chem 338:155
- (1992) J Electronal Chem , vol.338 , pp. 155
- Healy, J.P.¹ Pletcher, D.² Goodenough, M.³

10
- 4944262095
- Gabrielli C, Moçotéguy Ph, Perrot H, Wiart R (2004) J Electroanal Chem 572:367
- (2004) J Electroanal Chem , vol.572 , pp. 367
- Gabrielli, C.¹ Moçotéguy, P.² Perrot, H.³ Wiart, R.⁴

11
- 30744432903
- Gabrielli C, Moçotéguy Ph, Perrot H, Nieto-Senz D, Zdunek A (2006) Electrochim Acta 51:1462
- (2006) Electrochim Acta , vol.51 , pp. 1462
- Gabrielli, C.¹ Moçotéguy, P.² Perrot, H.³ Nieto-Senz, D.⁴ Zdunek, A.⁵

12
- 33845237117
- Gabrielli C, Moçotéguy Ph, Perrot H, Nieto-Sanz D, Zdunek A (2007) J Electrochem Soc 154:D13
- (2007) J Electrochem Soc , vol.154 , pp. 13
- Gabrielli, C.¹ Moçotéguy, P.² Perrot, H.³ Nieto-Sanz, D.⁴ Zdunek, A.⁵

13
- 0034514230
- (a) Moffat TP, Bonevich JE, Huber WH, Stanishevsky A, Kelly DR, Stafford GR, Josell D (2000) J Electrochem Soc 147:4524.
- (2000) J Electrochem Soc , vol.147 , pp. 4524
- Moffat, T.P.¹ Bonevich, J.E.² Huber, W.H.³ Stanishevsky, A.⁴ Kelly, D.R.⁵ Stafford, G.R.⁶ Josell, D.⁷

14
- 0001627408
- (b) Mattson E, O'M Bockris J (1959) Trans Faraday Soc 55:1586
- (1959) Trans Faraday Soc , vol.55 , pp. 1586
- Mattson, E.¹ O'M Bockris, J.²

15
- 40849143067
- O'M Bockris J, Enyo M (1962) Trans Faraday Soc 58:11
- (1962) Trans Faraday Soc , vol.58 , pp. 11
- Bockris O'M, J.¹ Enyo, M.²

16
- 40849149035
- Brown OR, Thirsk HR (1965) Electrochim Acta 10:3
- (1965) Electrochim Acta , vol.10 , pp. 3
- Brown, O.R.¹ Thirsk, H.R.²

17
- 0040759398
- Chao F, Costa M (1968) Bull Soc Chim Fr 10:4015
- (1968) Bull Soc Chim Fr , vol.10 , pp. 4015
- Chao, F.¹ Costa, M.²

18
- 0019691868
- Rashkov ST, Vuchkov L (1981) Surf Technol 14:309
- (1981) Surf Technol , vol.14 , pp. 309
- Rashkov, S.T.¹ Vuchkov, L.²

19
- 40849144109
- Gabrielli C, Moçotéguy Ph, Perrot H, Zdunek A, Nieto-Sanz D, Clech MC (2003) Electrochem Soc Proc 2003:121
- (2003) Electrochem Soc Proc , vol.2003 , pp. 121
- Gabrielli, C.¹ Moçotéguy, P.² Perrot, H.³ Zdunek, A.⁴ Nieto-Sanz, D.⁵ Clech, M.C.⁶

20
- 1542470432
- Gabrielli C, Moçotéguy PC, Perrot H, Zdunek A, Bouard P, Haddix M (2004) Electrochem Solid State Lett 7:C31
- (2004) Electrochem Solid State Lett , vol.7 , pp. 31
- Gabrielli, C.¹ Moçotéguy, P.C.² Perrot, H.³ Zdunek, A.⁴ Bouard, P.⁵ Haddix, M.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.