-
1
-
-
0032166781
-
-
P. C. Andricacos, C. Uzoh, J. O. Dukovic, J. Horkans, and H. Deligianni, IBM J. Res. Dev., 42, 567 (1998).
-
(1998)
IBM J. Res. Dev.
, vol.42
, pp. 567
-
-
Andricacos, P.C.1
Uzoh, C.2
Dukovic, J.O.3
Horkans, J.4
Deligianni, H.5
-
2
-
-
13844296716
-
-
T. P. Moffat, D. Wheeler, M. D. Edelstein, and D. Josell, IBM J. Res. Dev., 49, 19 (2005).
-
(2005)
IBM J. Res. Dev.
, vol.49
, pp. 19
-
-
Moffat, T.P.1
Wheeler, D.2
Edelstein, M.D.3
Josell, D.4
-
3
-
-
0032737992
-
-
A. E. Kaloyeros, X. M. Chen, T. Stark, K. Kumar, S. Seo, G. G. Peterson, H. L. Frisch, B. Arkles, and J. Sullivan, J. Electrochem. Soc., 146, 170 (1999).
-
(1999)
J. Electrochem. Soc.
, vol.146
, pp. 170
-
-
Kaloyeros, A.E.1
Chen, X.M.2
Stark, T.3
Kumar, K.4
Seo, S.5
Peterson, G.G.6
Frisch, H.L.7
Arkles, B.8
Sullivan, J.9
-
4
-
-
0035126760
-
-
A. Radisic, J. G. Long, P. M. Hoffmann, and P. C. Searson, J. Electrochem. Soc., 148, C41 (2001).
-
(2001)
J. Electrochem. Soc.
, vol.148
, pp. 41
-
-
Radisic, A.1
Long, J.G.2
Hoffmann, P.M.3
Searson, P.C.4
-
5
-
-
0037502889
-
-
A. Radisic, Y. Cao, P. Taephaisitphongse, A. C. West, and P. C. Searson, J. Electrochem. Soc., 150, C362 (2003).
-
(2003)
J. Electrochem. Soc.
, vol.150
, pp. 362
-
-
Radisic, A.1
Cao, Y.2
Taephaisitphongse, P.3
West, A.C.4
Searson, P.C.5
-
6
-
-
4544230382
-
-
L. Magagnin, A. Vicenzo, M. Bain, H. W. Toh, H. S. Gamble, and P. L. Cavallotti, Microelectron. Eng., 76, 131 (2004).
-
(2004)
Microelectron. Eng.
, vol.76
, pp. 131
-
-
Magagnin, L.1
Vicenzo, A.2
Bain, M.3
Toh, H.W.4
Gamble, H.S.5
Cavallotti, P.L.6
-
7
-
-
12344303279
-
-
S. K. Kim, S. K. Cho, J. J. Kim, and Y. S. Lee, Electrochem. Solid-State Lett., 8, C19 (2005).
-
(2005)
Electrochem. Solid-State Lett.
, vol.8
, pp. 19
-
-
Kim, S.K.1
Cho, S.K.2
Kim, J.J.3
Lee, Y.S.4
-
8
-
-
4344612140
-
-
Y. Cao, J. M. Lee, and A. C. West, Plat. Surf. Finish., 90, 40 (2003).
-
(2003)
Plat. Surf. Finish.
, vol.90
, pp. 40
-
-
Cao, Y.1
Lee, J.M.2
West, A.C.3
-
9
-
-
2542466584
-
-
P. C.Andricacos, P. C.Searson, C.Reidsema-Simpson, P.Allongue, J. L.Stickney and G. M.Oleszek, Editors, PV 99-9, p. The Electrochemical Society Proceedings Series, Pennington, NJ
-
H. Deligianni, J. O. Dukovic, E. G. Walton, R. J. Contolini, J. Reid, and E. Patton, in Electrochemical Processing in ULSI Fabrication and Semiconductor/Metal Depostion II, P. C. Andricacos, P. C. Searson, C. Reidsema-Simpson, P. Allongue, J. L. Stickney, and, G. M. Oleszek, Editors, PV 99-9, p. 83, The Electrochemical Society Proceedings Series, Pennington, NJ (1999).
-
(1999)
Electrochemical Processing in ULSI Fabrication and Semiconductor/Metal Depostion II
, pp. 83
-
-
Deligianni, H.1
Dukovic, J.O.2
Walton, E.G.3
Contolini, R.J.4
Reid, J.5
Patton, E.6
-
10
-
-
0026836631
-
-
M. Matlosz, P. H. Vallotton, A. C. West, and D. Landolt, J. Electrochem. Soc., 139, 752 (1992).
-
(1992)
J. Electrochem. Soc.
, vol.139
, pp. 752
-
-
Matlosz, M.1
Vallotton, P.H.2
West, A.C.3
Landolt, D.4
-
11
-
-
0038516975
-
-
O. Chyan, T. N. Arunagiri, and T. Ponnuswamy, J. Electrochem. Soc., 150, C347 (2003).
-
(2003)
J. Electrochem. Soc.
, vol.150
, pp. 347
-
-
Chyan, O.1
Arunagiri, T.N.2
Ponnuswamy, T.3
-
12
-
-
1842854747
-
-
D. Josell, D. Wheeler, C. Witt, and T. P. Moffat, Electrochem. Solid-State Lett., 6, C143 (2003).
-
(2003)
Electrochem. Solid-State Lett.
, vol.6
, pp. 143
-
-
Josell, D.1
Wheeler, D.2
Witt, C.3
Moffat, T.P.4
-
13
-
-
0142121744
-
-
M. W. Lane, C. E. Murray, F. R. McFeely, P. M. Vereecken, and R. Rosenberg, Appl. Phys. Lett., 83, 2330 (2003).
-
(2003)
Appl. Phys. Lett.
, vol.83
, pp. 2330
-
-
Lane, M.W.1
Murray, C.E.2
McFeely, F.R.3
Vereecken, P.M.4
Rosenberg, R.5
-
14
-
-
4344580459
-
-
R. Chan, T. N. Arunagiri, Y. Zhang, O. Chyan, R. M. Wallace, M. J. Kim, and T. Q. Hurd, Electrochem. Solid-State Lett., 7, G154 (2004).
-
(2004)
Electrochem. Solid-State Lett.
, vol.7
, pp. 154
-
-
Chan, R.1
Arunagiri, T.N.2
Zhang, Y.3
Chyan, O.4
Wallace, R.M.5
Kim, M.J.6
Hurd, T.Q.7
-
15
-
-
17044374035
-
-
T. N. Arunagiri, Y. Zhang, O. Chyan, M. El Bouanani, M. J. Kim, K. H. Chen, C. T. Wu, and L. C. Chen, Appl. Phys. Lett., 86, 083104 (2005).
-
(2005)
Appl. Phys. Lett.
, vol.86
, pp. 083104
-
-
Arunagiri, T.N.1
Zhang, Y.2
Chyan, O.3
El Bouanani, M.4
Kim, M.J.5
Chen, K.H.6
Wu, C.T.7
Chen, L.C.8
-
16
-
-
33644803500
-
-
T. P. Moffat, P. J. Chen, M. L. Walker, J. E. Bonevich, W. F. Egelhoff, D. Wheeler, L. J. Richter, and D. Josell, J. Electrochem. Soc., 153, C37 (2006).
-
(2006)
J. Electrochem. Soc.
, vol.153
, pp. 37
-
-
Moffat, T.P.1
Chen, P.J.2
Walker, M.L.3
Bonevich, J.E.4
Egelhoff, W.F.5
Wheeler, D.6
Richter, L.J.7
Josell, D.8
-
17
-
-
0000231326
-
-
J. O.Bockris, R. E.White, and B. E.Conway, Editors, p. Plenum Press, New York
-
A. Aramata, in Modern Aspects of Electrochemistry, J. O. Bockris, R. E. White, and, B. E. Conway, Editors, p. 181, Plenum Press, New York (1997).
-
(1997)
Modern Aspects of Electrochemistry
, pp. 181
-
-
Aramata, A.1
-
18
-
-
0035412732
-
-
E. Herrero, L. J. Buller, and H. D. Abruna, Chem. Rev. (Washington, D.C.), 101, 1897 (2001).
-
(2001)
Chem. Rev. (Washington, D.C.)
, vol.101
, pp. 1897
-
-
Herrero, E.1
Buller, L.J.2
Abruna, H.D.3
-
19
-
-
0001193064
-
-
H.Gerischer and C.Tobias, Editors, p. John Wiley & Sons, New York
-
D. M. Kolb, in Advances in Electrochemistry and Electrochemical Engineering, H. Gerischer, and, C. Tobias, Editors, p. 125, John Wiley & Sons, New York (1978).
-
(1978)
Advances in Electrochemistry and Electrochemical Engineering
, pp. 125
-
-
Kolb, D.M.1
-
20
-
-
0005209749
-
-
E. M. Stuve, J. W. Rogers, D. Ingersoll, D. W. Goodman, M. L. Thomas, and M. T. Paffett, Chem. Phys. Lett., 149, 557 (1988).
-
(1988)
Chem. Phys. Lett.
, vol.149
, pp. 557
-
-
Stuve, E.M.1
Rogers, J.W.2
Ingersoll, D.3
Goodman, D.W.4
Thomas, M.L.5
Paffett, M.T.6
-
22
-
-
20244376027
-
-
K. R. Zavadil, D. Ingersoll, and J. W. Rogers, J. Electroanal. Chem. Interfacial Electrochem., 318, 223 (1991).
-
(1991)
J. Electroanal. Chem. Interfacial Electrochem.
, vol.318
, pp. 223
-
-
Zavadil, K.R.1
Ingersoll, D.2
Rogers, J.W.3
-
23
-
-
4944250818
-
-
Y. B. Zhang, L. Huang, T. N. Arunagiri, O. Ojeda, S. Flores, O. Chyan, and R. M. Wallace, Electrochem. Solid-State Lett., 7, C107 (2004).
-
(2004)
Electrochem. Solid-State Lett.
, vol.7
, pp. 107
-
-
Zhang, Y.B.1
Huang, L.2
Arunagiri, T.N.3
Ojeda, O.4
Flores, S.5
Chyan, O.6
Wallace, R.M.7
-
24
-
-
0141630715
-
-
Z. V. Feng, X. Li, and A. A. Gewirth, J. Phys. Chem. B, 107, 9415 (2003).
-
(2003)
J. Phys. Chem. B
, vol.107
, pp. 9415
-
-
Feng, Z.V.1
Li, X.2
Gewirth, A.A.3
-
25
-
-
0036793873
-
-
M. Hayase, M. Taketani, K. Aizawa, T. Hatsuzawa, and K. Hayabusa, Electrochem. Solid-State Lett., 5, C98 (2002).
-
(2002)
Electrochem. Solid-State Lett.
, vol.5
, pp. 98
-
-
Hayase, M.1
Taketani, M.2
Aizawa, K.3
Hatsuzawa, T.4
Hayabusa, K.5
-
26
-
-
18344382063
-
-
J. P. Healy, D. Pletcher, and M. Goodenough, J. Electroanal. Chem., 338, 155 (1992).
-
(1992)
J. Electroanal. Chem.
, vol.338
, pp. 155
-
-
Healy, J.P.1
Pletcher, D.2
Goodenough, M.3
-
29
-
-
2042469471
-
-
T. P. Moffat, D. Wheeler, and D. Josell, J. Electrochem. Soc., 151, C262 (2004).
-
(2004)
J. Electrochem. Soc.
, vol.151
, pp. 262
-
-
Moffat, T.P.1
Wheeler, D.2
Josell, D.3
-
30
-
-
10844224602
-
-
M. Petri, D. M. Kolb, U. Memmert, and H. Meyer, J. Electrochem. Soc., 151, C793 (2004).
-
(2004)
J. Electrochem. Soc.
, vol.151
, pp. 793
-
-
Petri, M.1
Kolb, D.M.2
Memmert, U.3
Meyer, H.4
-
31
-
-
22544432262
-
-
M. L. Walker, L. J. Richter, and T. P. Moffat, J. Electrochem. Soc., 152, C403 (2005).
-
(2005)
J. Electrochem. Soc.
, vol.152
, pp. 403
-
-
Walker, M.L.1
Richter, L.J.2
Moffat, T.P.3
-
33
-
-
0026884465
-
-
F. Chao, M. Costa, and A. Tadjeddine, J. Electroanal. Chem., 329, 313 (1992).
-
(1992)
J. Electroanal. Chem.
, vol.329
, pp. 313
-
-
Chao, F.1
Costa, M.2
Tadjeddine, A.3
-
34
-
-
0002453986
-
-
I.Rubinstein, Editor, p. Marcel Dekker, New York
-
S. Gottesfeld, Y. T. Kim, and A. Redondo, in Physical Electrochemistry, I. Rubinstein, Editor, p. 393, Marcel Dekker, New York (1995).
-
(1995)
Physical Electrochemistry
, pp. 393
-
-
Gottesfeld, S.1
Kim, Y.T.2
Redondo, A.3
-
35
-
-
0002827463
-
-
R. J.Gale, Editor, p. Plenum Press, New York
-
D. M. Kolb, in Spectroelectrochemistry, R. J. Gale, Editor, p. 87, Plenum Press, New York (1988).
-
(1988)
Spectroelectrochemistry
, pp. 87
-
-
Kolb, D.M.1
-
36
-
-
0035278549
-
-
N. S. Marinkovic, J. X. Wang, H. Zajonz, and R. R. Adzic, J. Electroanal. Chem., 500, 388 (2001).
-
(2001)
J. Electroanal. Chem.
, vol.500
, pp. 388
-
-
Marinkovic, N.S.1
Wang, J.X.2
Zajonz, H.3
Adzic, R.R.4
-
37
-
-
0037066858
-
-
J. X. Wang, N. S. Marinkovic, H. Zajonz, B. M. Ocko, and R. R. Adzic, J. Phys. Chem. B, 105, 2809 (2001).
-
(2001)
J. Phys. Chem. B
, vol.105
, pp. 2809
-
-
Wang, J.X.1
Marinkovic, N.S.2
Zajonz, H.3
Ocko, B.M.4
Adzic, R.R.5
-
38
-
-
0018011482
-
-
S. Hadzijordanov, H. Angersteinkozlowska, M. Vukovic, and B. E. Conway, J. Electrochem. Soc., 125, 1471 (1978).
-
(1978)
J. Electrochem. Soc.
, vol.125
, pp. 1471
-
-
Hadzijordanov, S.1
Angersteinkozlowska, H.2
Vukovic, M.3
Conway, B.E.4
-
39
-
-
0020798514
-
-
R. O. Lezna, N. R. Detacconi, and A. J. Arvia, J. Electroanal. Chem. Interfacial Electrochem., 151, 193 (1983).
-
(1983)
J. Electroanal. Chem. Interfacial Electrochem.
, vol.151
, pp. 193
-
-
Lezna, R.O.1
Detacconi, N.R.2
Arvia, A.J.3
-
40
-
-
0001832447
-
-
D. Michell, D. A. J. Rand, and R. Woods, J. Electroanal. Chem. Interfacial Electrochem., 89, 11 (1978).
-
(1978)
J. Electroanal. Chem. Interfacial Electrochem.
, vol.89
, pp. 11
-
-
Michell, D.1
Rand, D.A.J.2
Woods, R.3
-
42
-
-
0037617433
-
-
K. Doblhofer, S. Wasle, D. M. Soares, K. G. Weil, G. Weinberg, and G. Ertl, Z. Phys. Chem. (Munich), 217, 479 (2003).
-
(2003)
Z. Phys. Chem. (Munich)
, vol.217
, pp. 479
-
-
Doblhofer, K.1
Wasle, S.2
Soares, D.M.3
Weil, K.G.4
Weinberg, G.5
Ertl, G.6
|