On the use of titanium nitride as structural material for nano-electro-mechanical systems (NEMS)

2005 5th IEEE Conference on Nanotechnology

Volumn 1, Issue , 2005, Pages 138-141

  Seneviratne, Dilan ^a   Nielson, Gregory N ^a,b   Takahashi, Satoshi ^a   Barbastathis, George ^a   Tuller, Harry L ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Microelectromechanical devices; Photonic switching systems; Stress control; Titanium compounds

Indexed keywords

MECHANICAL PROPERTIES; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; RESIDUAL STRESSES;

HIGH FREQUENCY APPLICATIONS; NEMS STRUCTURAL MATERIAL; PHOTONIC SWITCHING SYSTEMS; STRESS CONTROL;

TITANIUM NITRIDE;

EID: 33746945042     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2005.1500712     Document Type: Conference Paper

References (10)

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