Reflection type heterodyne grating interferometry for in-plane displacement measurement

Optics Communications

Volumn 281, Issue 9, 2008, Pages 2582-2589

  Hsu, Cheng Chih ^a   Wu, Chyan Chyi ^a   Lee, Ju Yi ^b   Chen, Hui Yi ^b   Weng, Han Fu ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

HETERODYNING; MEASUREMENT ERRORS; MEASUREMENT THEORY; OPTICAL DESIGN;

ENVIRONMENTAL VIBRATION; HETERODYNE GRATING INTERFEROMETRY;

INTERFEROMETRY;

EID: 40649128735     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optcom.2007.12.098     Document Type: Article

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