Compact diffractive interferometric displacement sensor in reflection

Precision Engineering

Volumn 26, Issue 1, 2002, Pages 1-6

  Jourlin, Y ^a   Jay, J ^a   Parriaux, O ^a  

^a UNIVERSITÉ JEAN MONNET   (France)

Author keywords

Gratings; Microsystems; Optical encoder

Indexed keywords

APPLICATION SPECIFIC INTEGRATED CIRCUITS; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; DIFFRACTION GRATINGS; INTERFEROMETRY; PHASE SHIFT;

OPTICAL ENCODERS;

OPTICAL SENSORS;

EID: 0036132853     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(01)00081-2     Document Type: Article

References (7)

1. Technology and applications of grating interferometers in high-precision measurement
2. Performance of interferometric rotation encoder using diffraction gratings
3. Linear and angular encoders for the high-resolution range
4. The self-mixing interference inside a laser diode: Application to displacement, velocity and distance measurement
5. Phase relationships of a two beam grating recombiner
6. Spatial-frequency bandwith in the photolithographic transfer of submicron gratings