Polarization interferometer for measuring small displacement

IEEE Transactions on Instrumentation and Measurement

Volumn 50, Issue 4, 2001, Pages 868-871

  Liu, Xinqun ^b   Clegg, Warwick ^a,b   Jenkins, David F L ^b   Liu, Bo ^a,b,c  

^a IEEE

^b UNIVERSITY OF PLYMOUTH   (United Kingdom)

^c DATA STORAGE INSTITUTE   (Singapore)

Author keywords

Displacement measurement; Dual beam; High speed; Homodyne interferometer; Polarization interferometer; Sub nanometer

Indexed keywords

BANDWIDTH; HARD DISK STORAGE; INTERFEROMETERS; LASER APPLICATIONS; LIGHT;

DISPLACEMENT MEASUREMENT; POLARIZATION INTERFEROMETERS;

LIGHT POLARIZATION;

EID: 0035414871     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/19.948290     Document Type: Conference Paper

References (11)

1. Optical heterodyne profilometry
2. Diode laser direct modulation heterodyne interferometer
3. High-accuracy absolute distance measurement by means of wavelength scanning heterodyne interferometry
4. Sinusoidal phase modulating interferometer with a feedback control system to eliminate external disturbance
5. Sinusoidal phase-modulating Fizeau interferometer using self-pumped phase conjugator for surface profile measurements
6. Phase measurement interferometry techniques
7. Phase-stepping interferometry with laser diodes: Effect of changes in laser power with output wavelength
8. An interferometer system scheme for the fast measurement of small displacement
9. Dual beam normal incidence polarization interferometry flying height testing
10. The displacement measurement of a shaker in an accelerometer caliberation system