Molecular dynamics simulations for nitridation of organic polymer surfaces due to hydrogen-nitrogen ion beam injections

Thin Solid Films

Volumn 516, Issue 11, 2008, Pages 3449-3453

  Yamashiro, Masashi ^a   Yamada, Hideaki ^b   Hamaguchi, Satoshi ^a  

^a OSAKA UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Carbon nitride; Etching; Molecular dynamics simulation; Nitridation; Organic polymer; Sputtering

Indexed keywords

CARBON NITRIDE; ETCHING; MOLECULAR DYNAMICS; NITRIDATION; SPUTTERING;

AMMONIA BEAMS; ORGANIC POLYMER SURFACES; POLYPARAPHENYLENE (PPP); REACTIVE IONS;

ORGANIC POLYMERS;

EID: 40649127930     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.08.016     Document Type: Article

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