Uncooled thermopile infrared detector with chromium oxide absorption layer

Sensors and Actuators, A: Physical

Volumn 95, Issue 1, 2001, Pages 24-28

  Lee, Sung Jun ^a,c   Lee, Yun Hi ^a   Suh, Sang Hi ^a   Ju, Byeong Kwon ^a   Oh, Myeong Hwan ^a   Oh, Young Je ^a   Kim, Tae Yoon ^b   Kim, Chul Ju ^c  

^a Korea Institute of Science and Technology   (South Korea)

^b Thermometrics Korea   (South Korea)

^c University of Seoul   (South Korea)

Author keywords

Anisotropic wet etching; Electro motive force; Infrared absorption; Thermal isolation; Thermopile

Indexed keywords

ALUMINUM; CHROMIUM COMPOUNDS; ELECTRIC POTENTIAL; ETCHING; IRRADIATION; LIGHT ABSORPTION; SEMICONDUCTING BORON; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DOPING; THERMOCOUPLES; THERMOPILES;

ANISOTROPIC WET ETCHING; CHROMIUM OXIDE; INFRARED ABSORPTION; THERMAL ISOLATION;

INFRARED DETECTORS;

EID: 0035892866     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00743-9     Document Type: Article

References (15)