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Volumn 103, Issue 4, 2008, Pages

Effects of high pressure annealing on the characteristics of solid phase crystallization poly-Si thin-film transistors

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLIZATION; GLASS; ORGANIC LIGHT EMITTING DIODES (OLED); POLYSILICON;

EID: 40149086055     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2885345     Document Type: Article
Times cited : (16)

References (12)
  • 8
    • 33644661681 scopus 로고    scopus 로고
    • International Display Manufacturing Conference (IDMC 2005), Taipei International Convention Center, Taiwan, 21-24 February (unpublished)
    • H. Chishina, A. Yoshinouchi, Y. Nagasawa, J. Inoue, and Y. Kawakaki, International Display Manufacturing Conference (IDMC 2005), Taipei International Convention Center, Taiwan, 21-24 February 2005 (unpublished), pp. 169-172.
    • (2005) , pp. 169-172
    • Chishina, H.1    Yoshinouchi, A.2    Nagasawa, Y.3    Inoue, J.4    Kawakaki, Y.5
  • 9
    • 40149109596 scopus 로고
    • Introduction to Microelectronic Fabrication, Modular Series on Solid State Devices Vol. (Addison-Wesley, Massachusetts).
    • R. C. Jaeger, Introduction to Microelectronic Fabrication, Modular Series on Solid State Devices Vol. 5 (Addison-Wesley, Massachusetts, 1988).
    • (1988) , vol.5
    • Jaeger, R.C.1
  • 10
    • 1642621158 scopus 로고
    • JAPIAU 0021-8979 10.1063/1.1713945.
    • B. E. Deal and A. S. Grove, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1713945 36, 3770 (1965).
    • (1965) J. Appl. Phys. , vol.36 , pp. 3770
    • Deal, B.E.1    Grove, A.S.2
  • 11
    • 0027694801 scopus 로고
    • JAPLD8 0021-4922 10.1143/JJAP.32.L1584.
    • T. Noguchi, Jpn. J. Appl. Phys., Part 2 JAPLD8 0021-4922 10.1143/JJAP.32.L1584 32, L1584 (1993).
    • (1993) Jpn. J. Appl. Phys., Part 2 , vol.32 , pp. 1584
    • Noguchi, T.1
  • 12
    • 40149111816 scopus 로고    scopus 로고
    • International Display Worksho(IDW'03), Fukuoka International Congress Center, Japan, 3-5 December (unpublished)
    • D. H. Deng, S. P. Wang, S. C. Chang, and Y. M. Tsai, International Display Workshop (IDW'03), Fukuoka International Congress Center, Japan, 3-5 December 2003 (unpublished), pp. 411-414.
    • (2003) , pp. 411-414
    • Deng, D.H.1    Wang, S.P.2    Chang, S.C.3    Tsai, Y.M.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.