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Volumn , Issue , 2005, Pages 169-172

A high pressure annealing system for high performance LTPS TFTs

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; HEAT TREATMENT; OXIDATION; POLYSILICON; THIN FILMS;

EID: 33644661681     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (1)

References (4)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.