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Volumn , Issue , 2005, Pages 169-172
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A high pressure annealing system for high performance LTPS TFTs
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IHI CORPORATION
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
HEAT TREATMENT;
OXIDATION;
POLYSILICON;
THIN FILMS;
LOW-TEMPERATURE POLY-SILICON (LTPS);
POLY-SILICON FILM;
THIN FILM TRANSISTORS;
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EID: 33644661681
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (4)
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