A theory for the formation of tetrahedral amorphous carbon including deposition rate effects

Thin Solid Films

Volumn 280, Issue 1-2, 1996, Pages 95-100

  Yin, Y ^a   McKenzie, D R ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

Author keywords

Amorphous carbon; Deposition process; Diamond

Indexed keywords

AMORPHOUS CARBON; CRITICAL ION ENERGY; DEPOSITION RATE EFFECTS; ION ENERGY DEPOSITION RATE DIAGRAM; PLASMON ENERGY;

CARBON; DEPOSITION; DIAMONDS; HEAT RESISTANCE; ION BOMBARDMENT; MATHEMATICAL MODELS; PLASMAS;

AMORPHOUS FILMS;

EID: 0030195960     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)08247-6     Document Type: Article

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