Effect of deposition temperature on the microstructure and electrical properties of Ba0.8Sr0.2TiO3 thin films deposited by radio-frequency magnetron sputtering

Thin Solid Films

Volumn 516, Issue 10, 2008, Pages 3416-3421

  Jha, G C ^a   Ray, S K ^a   Manna, I ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY   (India)

Author keywords

BST; Monte Carlo simulation; Radio frequency magnetron sputtering

Indexed keywords

BARIUM COMPOUNDS; ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; MICROSTRUCTURE; MONTE CARLO METHODS; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION;

DEPOSITION TEMPERATURE; RADIO FREQUENCY MAGNETRON SPUTTERING;

THIN FILMS;

EID: 39649085343     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.11.122     Document Type: Article

References (15)

1. Hwang C.S., Park S.O., Cho H.-J., Kang C.S., Kang H.-K., Lee S.I., and Lee M.Y. Appl. Phys. Lett. 67 (1995) 2819
2. Agarwal S., Sharma G.L., and Manchanda R. Solid State Commun. 119/12 (2001) 681
3. Zhu W., Tan O.K., Yan Q., and Oh J.T. Sens. Actuators B B65 (2000) 366
4. Liddiard K.C., Ringh U., and Jansson C. In: Dereniak E.L., and Sampson R.E. (Eds). Proc. SPIE- Int. Soc. Opt. Eng. (1996) 72 Orlando, FL, USA
5. Wang Z., Liu J., Ren T., and Liu L. Sens. Actuators, A 117 (2004) 293
6. Fox G.R., and Krupanidhi S.B. J. Mater. Res. 8 (1993) 2203
7. Fox G.R., Krupanidhi S.B., More K.I., and Allard L.F. J. Mater. Res. 7 (1992) 3039
8. Lee J., Choi Y.-C., and Lee B.-S. Jpn. J.Appl. Phys., Part 1 36 (1997) 3644
9. Kang C.S., Cho H.-J., Hwang C.S., Lee B.T., Lee K.-H., Horii H., Kim W.D., Lee S.I., and Lee M.Y. Jpn. J.Appl. Phys., Part 1 36 (1997) 6946
10. Lahiry S., Gupta V., Sreenivas K., and Mansingh A. IEEE Trans Ultrason Ferroelectrics Freq Contr. 47 (2000) 854
11. Saha S., and Krupanidhi S.B. J. Appl. Phys. 87 (2000) 849
12. Yang Y.G., Zhou X.W., Johnson R.A., and Wadley H.N.G. Acta Mater. 49 (2001) 3321
13. Panda B., Dhar A., Nigam G.D., Bhattacharya D., and Ray S.K. J.Appl. Phys. 83 (1998) 1114
14. Malaurie A., and Bessaudou A. Thin Solid Films 286 (1996) 305
15. Powder Diffraction File, Joint Committee on Power Diffraction Standards-International Centre for Diffraction Data (1997), ASTM, Philadelphia, PA Card-440093