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Solid State Communications

Volumn 119, Issue 12, 2001, Pages 681-686

Electrical conduction in (Ba, Sr)TiO3 thin film MIS capacitor under humid conditions

(3) Agarwal, Seema a Sharma, G L a Manchanda, R b

a INDIAN INSTITUTE OF TECHNOLOGY DELHI (India)

b SOLID STATE PHYSICS LABORATORY (India)

Author keywords

A. dielectric; A. thin films; B. sol gel; D. humidity; E. impedance

Indexed keywords

BARIUM COMPOUNDS; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC CONDUCTIVITY; MIS DEVICES; SILICON; SOL-GELS; SUBSTRATES;

HUMIDITY SENSORS;

THIN FILMS;

EID: 0035812437 PISSN: 00381098 EISSN: None Source Type: Journal
DOI: 10.1016/S0038-1098(01)00284-8 Document Type: Article

Times cited : (55)

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