New capacitor parametric test methodology for process issues control

ESSDERC 2007 - Proceedings of the 37th European Solid-State Device Research Conference

Volumn 2007, Issue , 2007, Pages 398-401

  Manceau, J P ^a,b   Bajolet, A ^a   Cremer, S ^a   Quoirin, M ^a   Bruyere S ^a   Sylvestre, A ^b   Gonon, P ^c  

^a STMICROELECTRONICS   (France)

^b CNRS   (France)

^c Laboratoire Interdisciplinaire de Physique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; DIELECTRIC RELAXATION; ELECTRIC RESISTANCE; MEASUREMENT THEORY; MIM DEVICES; PARAMETER ESTIMATION;

NEW CAPACITOR PARAMETRIC TEST METHODOLOGY; POTENTIAL DIELECTRIC CONTAMINATION; PROCESS ISSUES CONTROL; SERIES RESISTANCE;

PROCESS CONTROL;

EID: 39549111655     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSDERC.2007.4430962     Document Type: Conference Paper

References (9)

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