Dielectric relaxation characterization and modeling in large frequency and temperature domain. Application to 5fF/μm2 Ta2O 5 MIM capacitor

IEEE International Conference on Microelectronic Test Structures

Volumn 2006, Issue , 2006, Pages 199-204

  Manceau, J P ^a,b   Bruyere S ^a   Picollet, E ^a   Minondo, M ^a   Grundrich, C ^a   Cottin, D ^a   Bely, M ^a  

^a STMICROELECTRONICS   (France)

^b LABORATOIRE D ELECTROTECHNIQUE DE GRENOBLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

MEMORY EFFECTS; RC POLES; TEMPERATURE DOMAIN; TEST CHIP;

CAPACITANCE; COMPUTER SIMULATION; DIELECTRIC RELAXATION; ELECTRIC POTENTIAL; FREQUENCY DOMAIN ANALYSIS; MATHEMATICAL MODELS; MICROPROCESSOR CHIPS; MIM DEVICES; TANTALUM COMPOUNDS;

CAPACITORS;

EID: 33749508728     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMTS.2006.1614303     Document Type: Conference Paper

References (9)

1. C. H. Ng, C.-S. Ho, S.-F. S. Chu, and S.-C. Sun, "MIM Capacitor Integration for Mixed-Signal/RF Applications," IEEE Transactions on Electron Devices, Vol.52, No. 7, pp. 1399-1409, (2005).
2. E. Deloffre, C. Wyon, and M. Gros-Jean, "Investigation and characterisation of MIM structures based on MOCVD and PEALD deposited Ta2O5 films," ECS Proceeding, (Spring 2005), 510.
3. A. K. Jonscher, "Dielectric Relaxation in Solids", London, Chelsea Dielectric (1983).
4. H. Reisinger, G. Steinlesberger, S. Jakschik, M. Gutsche, T. Hecht, M. Leonhard, U. Schröder, H. Seidl, and D. Schumann, "A comparative study of dielectric relaxation losses in alternative dielectrics," IEDM Tech. Dig., pp. 267-270, (2001).
5. A. Zanchi, F. Tsay, and I. Papantonopoulos, "Impact of Capacitor Dielectric Relaxation on a 14-bit 70MS/S Pipeline ADC in 3-V BiCMOS," IEEE J. Solid-State Circuits, vol. 38, pp. 2077-2086, (2003).
6. J. W. Fattaruso, M. De Wit, G. Warwar, K.-S. Tan, and R. K. Hester, "The effect of dielectric relaxation on charge-redistribution A/D converters," IEEE J. Solid-State Circuits, vol. 25, pp. 1550-1561, (1990).
7. J. C. Kuenen, and G. C. M. Meijer, "Measurement of dielectric absorption of capacitors and analysis of its effects on VCO's," IEEE Trans. Instrum. Meas., vol. 45, pp. 89-97, Feb. 1996.
8. P.C. Dow, "An analysis of certain errors in electronic differential analyzers, II-Capacitor dielectric absorption," IRE Trans Electron. Comput., pp. 17-22, (1958).
9. E. Itoh, K. Maki, and K. Miyairi, "Effect of annealing on dielectric dispersion of tantalum oxide films prepared by RF sputtering," IEEE Annual report -CEIDP 1999, pp. 62-65, (1999).