Modeling and optimization of series resistance of planar MIM capacitors

Solid-State Electronics

Volumn 50, Issue 7-8, 2006, Pages 1244-1251

  Bajolet, A ^a,b   Clerc, R ^b   Pananakakis, G ^b   Picollet, E ^a   Segura, N ^a   Boret, S ^a   Bruyere S ^a   Manceau, J P ^a,c   Giraudin, J C ^a   Delpech, P ^a   Montes L ^b   Ghibaudo, G ^b  

^a STMICROELECTRONICS   (France)

^b IMEP LAHC   (France)

^c LABORATOIRE D ELECTROTECHNIQUE DE GRENOBLE   (France)

Author keywords

Analytical modeling; Layout optimization; Metal insulator metal capacitor; Series resistance

Indexed keywords

CAPACITANCE; CAPACITORS; COMPUTER SIMULATION; ELECTRIC RESISTANCE; ELECTRODES; MATHEMATICAL MODELS; METAL INSULATOR BOUNDARIES; NUMERICAL ANALYSIS; OPTIMIZATION; PARAMETER ESTIMATION;

ANALYTICAL MODELING; LAYOUT OPTIMIZATION; METAL-INSULATOR-METAL CAPACITORS; SERIES RESISTANCE;

MIM DEVICES;

EID: 33747153313     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2006.06.015     Document Type: Article

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