Modeling, optimization, and growth of GaN in a vertical halide vapor-phase epitaxy bulk reactor

Journal of Crystal Growth

Volumn 310, Issue 5, 2008, Pages 906-910

  Hemmingsson, C ^a   Pozina, G ^a   Heuken, M ^b   Schineller, B ^b   Monemar, B ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b AIXTRON AG   (Germany)

Author keywords

A1. Fluid flows; A1. Growth models; A1. Mass transfer; A2. Growth from vapor; A3. Hydride vapor phase epitaxy; B2. Semiconducting III V materials

Indexed keywords

FLOW OF FLUIDS; MASS TRANSFER; NUMERICAL METHODS; OPTIMIZATION; VAPOR PHASE EPITAXY;

GROWTH FROM VAPOR; GROWTH MODELS; HYDRIDE VAPOR PHASE EPITAXY;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 39149140753     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2007.11.062     Document Type: Article

References (17)

1. Nakamura S., Mukai T., and Senoh M. Appl. Phys. Lett. 64 (1994) 1687
2. In: Nakamura S., and Fasol G. (Eds). The Blue Laser Diode (1997), Springer, Berlin
3. Xu G.Y., Salvador A., Kim W., Fan Z., Lu C., Tang H., Morkoc H., Smith G., Estes M., Goldberg B., Yank W., and Krishnankutty S. Appl. Phys. Lett. 71 (1997) 2154
4. Porowski S., and Grzegory I. J. Crystal Growth 178 (1997) 174
5. Kurai S., Naoi Y., Abe T., Ohmi S., and Sakai S. Jpn. J. Appl. Phys. 35 (1996) L77
6. Vodakov Yu.A., Mokhov E.N., Roenkov A.D., Boiko M.E., and Baranov P.G. J. Crystal Growth 183 1-2 (1998) 10
7. Aoki M., Yamane H., Shimada M., Sekiguchi T., Hanada T., Yao T., Sarayama S., and DiSalvo F.J. J. Crystal Growth 218 (2000) 7
8. Ketchum D.R., and Kolis J.W. J. Crystal Growth 222 (2001) 431
9. Molnar R.J., Götz W., Romano L.T., and Johnson N.M. J. Crystal Growth 178 (1997) 147
10. Kelly M.K., Vaudo R.P., Phanse V.M., Gorgens L., Ambacher O., and Stutzmann M. Jpn. J. Appl. Phys. 38 (1999) L217
11. Hemmingsson C., Paskov P.P., Pozina G., Heuken M., Schineller B., and Monemar B. Superlattices Microstruct. 40 4-6 (2006) 205 (SPEC. ISS)
12. Kleijn C.R., and Kuijlaars K.J. Phoenics J. Comp. Fluid Dyn. 8 (1995) 404
13. Fiveland W.A. J. Heat Transfer 106 (1984) 699
14. Karpov S.Y., Alexander A.S., Zimina D.V., Smirnov S.A., Sid'ko A.P., Kondratyev A.V., Makarov Y.N., Martin D., Wagner V., and Ilegems M. Mater. Res. Soc. Symp.-Proc. 743 (2002) 225
15. Dam C.E.C., Grzegorczyk A.P., Hageman P.R., Dorsman R., Kleijn C.R., and Larsen P.K. J. Crystal Growth 271 1-2 (2004) 192
16. Gil B. In: Willardson R.K., and Weber E.R. (Eds). Gallium Nitride II, Semiconductors and Semimetals vol. 57 (1999), Academic Press, New York 209-274
17. Monemar B. J. Phys.: Condens. Matter 13 (2001) 7011