AlN nanoclusters formation by plasma ion immersion implantation

Surface and Coatings Technology

Volumn 202, Issue 11, 2008, Pages 2319-2322

  Valcheva, E ^a   Dimitrov, S ^a   Manova, D ^b   Mandl S ^b   Alexandrova, S ^c  

^a UNIVERSITY OF SOFIA   (Bulgaria)

^b LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^c TECHNICAL UNIVERSITY OF SOFIA   (Bulgaria)

Author keywords

AlN; ERDA; PIII; XPS

Indexed keywords

AMORPHOUS MATERIALS; BINDING ENERGY; CHEMICAL BONDS; ION IMPLANTATION; NANOCLUSTERS; PLASMA APPLICATIONS; SILICA; STOICHIOMETRY;

ELASTIC RECOIL DETECTION ANALYSIS; PLASMA ION IMMERSION IMPLANTATION;

NITRIDES;

AMORPHOUS MATERIALS; BINDING ENERGY; CHEMICAL BONDS; ION IMPLANTATION; NANOCLUSTERS; NITRIDES; PLASMA APPLICATIONS; SILICA; STOICHIOMETRY;

EID: 38949214737     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.08.051     Document Type: Article

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