Ion beam synthesis of AlN nanostructured thin films

Journal of Optoelectronics and Advanced Materials

Volumn 9, Issue 1, 2007, Pages 166-169

  Valcheva, E ^a   Manova, D ^b   Mandl S ^b   Alexandrova, S ^b   Lutz, J ^b   Dimitrov, S ^b  

^a UNIVERSITY OF SOFIA   (Bulgaria)

^b NONE

Author keywords

AlN; Ion beam synthesis; Ion profiles; Nanoclustering

Indexed keywords

ALUMINUM NITRIDE; BOND STRENGTH (CHEMICAL); III-V SEMICONDUCTORS; ION BEAMS; MONTE CARLO METHODS; SILICA; SILICON OXIDES; THIN FILMS;

CHEMICAL COMPOSITIONS; ION BEAM SYNTHESIS; ION PROFILES; NANOCLUSTERING; NANOSTRUCTURED THIN FILM; PLASMA ION IMMERSION IMPLANTATION; SEQUENTIAL IMPLANTATIONS; SILICONDIOXIDE SUBSTRATES;

IONS;

EID: 38749090902     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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