Improvement of the uniformity in electronic properties of AZO films using an rf magnetron sputtering with a mesh grid electrode

Materials Science and Engineering: B

Volumn 148, Issue 1-3, 2008, Pages 26-29

  Yasui, Kanji ^a   Asano, Akira ^a   Otsuji, Miku ^a   Katagiri, Hironori ^b   Masuda, Atsushi ^c   Nishiyama, Hiroshi ^a   Inoue, Yasunobu ^a   Takata, Masasuke ^a   Akahane, Tadashi ^a  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

^b NAGAOKA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Thin films; Zinc oxide

Indexed keywords

CHARGED PARTICLES; CRYSTALLITES; DOPING (ADDITIVES); ELECTRODEPOSITION; MAGNETRON SPUTTERING; SURFACE STRUCTURE; THIN FILMS;

AZO FILMS; MESH GRID ELECTRODES; RADIO FREQUENCIES;

ZINC OXIDE;

EID: 38949208203     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2007.09.016     Document Type: Article

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