Advantage of the structure and the electrical properties of epitaxial ultra-thin zirconia gate dielectrics

Materials Science and Engineering: B

Volumn 148, Issue 1-3, 2008, Pages 30-34

  Kiguchi, Takanori ^a   Wakiya, Naoki ^b   Tanaka, Junzo ^a   Shinozaki, Kazuo ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b SHIZUOKA UNIVERSITY   (Japan)

Author keywords

Gate dielectrics; Monoclinic phase; Size effect; Tetragonal phase; Transmission electron microscopy; Zirconia

Indexed keywords

CAPACITANCE MEASUREMENT; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; HYSTERESIS; THIN FILMS; VOLTAGE MEASUREMENT; ZIRCONIA;

CHARGE INJECTION TYPE HYSTERESIS; MONOCLINIC PHASE; SIZE EFFECT; TETRAGONAL PHASE; ULTRA THIN ZIRCONIA GATE DIELECTRICS; WIDE ANGLE X RAY RECIPROCAL SPACE MAPPING;

GATE DIELECTRICS;

EID: 38949206848     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2007.09.037     Document Type: Article

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