Uniformity of internal linear-type inductively coupled plasma source for flat panel display processing

Applied Physics Letters

Volumn 92, Issue 5, 2008, Pages

  Lim, Jong Hyeuk ^a   Kim, Kyong Nam ^a   Park, Jung Kyun ^a   Lim, Jong Tae ^a   Yeom, Geun Young ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

FLAT PANEL DISPLAYS; NATURAL FREQUENCIES; PLASMA DENSITY;

PLASMA UNIFORMITY;

INDUCTIVELY COUPLED PLASMA;

EID: 38949184497     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2840997     Document Type: Article

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