Novel internal linear inductively coupled plasma source for flat panel display applications

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 11, 2005, Pages 8133-8137

  Kim, Kyong Nam ^a   Jung, Seung Jae ^a   Yeom, Geun Young ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Display; Etching; High density plasma; Large area

Indexed keywords

ANTENNAS; ETCHING; FLAT PANEL DISPLAYS; PLASMA DENSITY; PLASMA SOURCES;

HIGH DENSITY PLASMA; LARGE AREA;

INDUCTIVELY COUPLED PLASMA;

EID: 31544480046     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.44.8133     Document Type: Article

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