Effect of SrTiO3 seed layer deposition time and thickness on low-temperature crystallization and electrical properties of Pb(Zr, Ti)O3 films by metalorganic chemical vapor deposition

Materials Science and Engineering: B

Volumn 148, Issue 1-3, 2008, Pages 22-25

  Moon, Ji Won ^a   Wakiya, Naoki ^b   Fujito, Keisuke ^a   Iimori, Naohiko ^a   Kiguchi, Takanori ^a   Yoshioka, Tomohiko ^a   Tanaka, Junzo ^a   Shinozaki, Kazuo ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b SHIZUOKA UNIVERSITY   (Japan)

Author keywords

Low temperature crystallization; PZT; Seed layer; SrTiO3

Indexed keywords

CRYSTALLIZATION; CURRENT DENSITY; FILM THICKNESS; LEAD COMPOUNDS; LEAKAGE CURRENTS; LOW TEMPERATURE TESTING; METALLORGANIC CHEMICAL VAPOR DEPOSITION; THIN FILMS;

PIEZOELECTRIC FILMS; SEED LAYER DEPOSITION; SEED LAYERS;

PIEZOELECTRIC MATERIALS;

EID: 38949177004     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2007.09.051     Document Type: Article

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