Effects of the deposition conditions of the seed layer on the crystallinity and electrical characteristics of the Pb(Zr,Ti)O3 films

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 37, Issue 5 B, 1998, Pages

  Kim, S T ^a   Kim, Y I ^a   Kim, H H ^a   Lee, M Y ^a   Lee, W J ^a  

^a SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON CYCLOTRON RESONANCE; PLASMAS; SPUTTERING; THIN FILMS; TITANIUM COMPOUNDS;

SEED LAYER EFFECTS;

LEAD COMPOUNDS;

EID: 0032067087     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.l594     Document Type: Article

References (9)