Application of interferometry for 3-dimensional visualization of MgO-layer erosion in a.c.-plasma display panels

Surface and Coatings Technology

Volumn 169-170, Issue , 2003, Pages 557-561

  Choi, Seungho ^a   Shin, Gilyong ^a   Byun, Hyunsuk ^a   Oh, Soo Ghee ^a   Lee, Soonil ^a  

^a Ajou University   (South Korea)

Author keywords

3 Dimensional visualization; A.c. Plasma display panel; In situ measurement; Interferometry; MgO layer erosion

Indexed keywords

DEPOSITION; ELECTRODES; PLASMA DISPLAY DEVICES; SPECTROSCOPIC ANALYSIS;

TRANSMISSION SPECTRA;

MAGNESIA;

COATING; EROSION; INTERFEROMETRY; MAGNESIUM OXIDE; PLASMA TREATMENT; SURFACE TREATMENT;

EID: 0038129933     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00212-3     Document Type: Article

References (5)

1. Uchiike H. Miura K. Nakayama N. Shinoda T. Fukushima Y. IEEE Trans. Electron Devices ED-23 1976 1211
2. Hidaka S. Ishimoto M. Iwase N. Betsui K. Inoue H. IEICE Trans. Electron E82-C 1999 1804
3. Son C. Cho J. Park J.W. J. Vac. Sci. Technol. A 17 1999 2619
4. Swanepoel R. J. Phys. E 16 1983 1214
5. Choi S.H. Oh S.-G. Lee S. Thin Solid Films 384 2001 115