Advances in optical carrier profiling through high-frequency modulated optical reflectance

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 1, 2008, Pages 310-316

  Bogdanowicz, Janusz ^b   Dortu, Fabian ^a   Clarysse, Trudo ^b   Vandervorst, Wilfried ^a,b   Shaughnessy, Derrick ^c   Salnik, Alex ^c   Nicolaides, Lena ^c   Opsal, Jon ^c  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b IMEC   (Belgium)

^c KLA TENCOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC JUNCTION DEPTH; MICROMETER BEAM SIZE; PHOTOMODULATED OPTICAL REFLECTANCE (PMOR); THERMA-PROBE® (TP);

CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; CRYSTAL GROWTH; PLASMAS; REFLECTION; SEMICONDUCTOR DOPING;

FREQUENCY MODULATION;

EID: 38849163060     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2819252     Document Type: Article

References (24)

1. International Technology Roadmap for Semiconductors, http://www.itrs.net.
2. R. E. Wagner and A. Mandelis, J. Phys. Chem. Solids JPCSAW 0022-3697 10.1016/0022-3697(91)90039-3 52, 1061 (1991).
3. J. Opsal, M. W. Taylor, W. L. Smith, and A. Rosencwaig, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.338863 61, 240 (1987).
4. A. Rosencwaig, J. Opsal, W. Smith, and D. Willenborg, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.95794 46, 1013 (1985).
5. J. Opsal and A. Rosencwaig, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.96105 47, 498 (1985).
6. A. Salnick and J. Opsal, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1448410 91, 2874 (2002).
7. A. Mandelis and R. E. Wagner, Jpn. J. Appl. Phys., Part 1 JAPNDE 0021-4922 10.1143/JJAP.35.1786 35, 1786 (1996).
8. C. Christofides, I. A. Vitkin, and A. Mandelis, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.345449 67, 2815 (1990).
9. T. Clarysse, W. Vandervorst, M. Bakshi, L. Nicolaides, A. Salnik, and J. Opsal, J. Vac. Sci. Technol. B JVTBD9 1071-1023 10.1116/1.2190655 24, 1139 (2006).
10. F. Dortu, T. Clarysse, R. Loo, and W. Vandervorst, J. Vac. Sci. Technol. B JVTBD9 1071-1023 10.1116/1.2132322 24, 375 (2006).
11. F. Dortu, J. Bogdanowicz, T. Clarysse, and W. Vandervorst, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2464183 101, 053107 (2007).
12. A. Salnick, L. Nicolaides, J. Opsal, A. Jain, D. Rogers, and L. Robertson, Rev. Sci. Instrum. RSINAK 0034-6748 10.1063/1.1755445 75, 2144 (2004).
13. D. B. M. Klaassen, Solid-State Electron. SSELA5 0038-1101 10.1016/0038-1101(92)90325-7 35, 953 (1992).
14. F. Dortu, T. Clarysse, R. Loo, B. Pawlak, R. Deliougne, and W. Vandervorst, J. Vac. Sci. Technol. B JVTBD9 1071-1023 10.1116/1.2190654 24, 1131 (2006).
15. A. Mandelis, Diffusion-Wave Fields: Mathematical Methods and Green Functions, 1st ed. (Springer, New York, 2001).
16. H. S. Carslaw and J. Jaeger, Conduction of Heat in Solids, 2nd ed. (Oxford U. P., New York, 1986).
17. J. McKelvey, Solid-State and Semiconductor Physics (Harper & Row, New York, 1966), Chap..
18. A. Schenk, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.368545 84, 3684 (1998).
19. R. A. Smith, Wave Mechanics of Crystalline Solids (Chapman and Hall, London, 1969).
20. J. Opsal and A. Rosencwaig, Rev. Prog. Quant. Nondestr. Eval. 7, 215 (1988).
21. P. Borden, L. Bechtler, K. Lingel, and R. Nijmeijer, Handbook of Silicon Metrology (CRC, Boca Raton, FL, 2001), Chap..
22. F. Dortu, J. Bogdanowicz, T. Clarysse, and W. Vandervorst, Proceedings of the Insight Workshop 2007, Napa, CA, May 2007.
23. B. C. Forget, I. Barbereau, D. Fournier, S. Tuli, and A. B. Battacharyya, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.117073 69, 1107 (1996).
24. T. Clarysse, Mater. Sci. Eng. B 114-115, 166 (2004).