Nonlinear study of photoelectrothermal modulated optical reflectance for active dopant profile extraction

Journal of Applied Physics

Volumn 101, Issue 5, 2007, Pages

  Dortu, Fabian ^a,b   Bogdanowicz, Janusz ^a,b   Clarysse, Trudo ^b   Vandervorst, Wilfried ^a,b  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ILLUMINATION METERS; LASER BEAM EFFECTS; LIGHT REFLECTION; NONLINEAR SYSTEMS; PUMPING (LASER); SEMICONDUCTOR DOPING;

DRIFT-DIFFUSION EQUATIONS; METALLURGICAL JUNCTIONS; PHOTOELECTROTHERMAL MODULATED OPTICAL REFLECTANCE (PMOR); PUMP POWER; ULTRASHALLOW JUNCTIONS;

SEMICONDUCTOR JUNCTIONS;

EID: 33947433303     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2464183     Document Type: Article

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