Design and analysis of integrated flow sensors by means of a two-dimensional finite element model

Sensors and Actuators, A: Physical

Volumn 142, Issue 1, 2008, Pages 153-159

  Bruschi, P ^a   Ciomei, A ^a   Piotto, M ^b  

^a Dipartimento di Ingegneria dell'Informazione   (Italy)

^b CNR   (Italy)

Author keywords

Finite element simulations; Flow sensor; Integrated sensors

Indexed keywords

COMPUTATIONAL EFFICIENCY; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MACHINE DESIGN; MATHEMATICAL MODELS; MEASUREMENT THEORY;

FINITE ELEMENT SIMULATIONS; FLOW SENSORS; INTEGRATED SENSORS;

SENSORS;

EID: 38849146993     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.05.019     Document Type: Article

References (19)

1. Elwenspoek M., and Wiegerink R. Mechanical Microsensors (2001), Springer-Verlag, Berlin
2. Damean N., Regtien P.P.L., and Elwenspoek M. Heat transfer in a MEMS for microfluidics. Sens. Actuators A 105 (2003) 137-149
3. Gao D., Qin M., and Cheng H. Optimization and test of a calorimetric silicon flow sensor. Proceedings of International Conference on Information Acquisition, vol. 21-25. Hefei, China (2004) 99-102
4. Schöler L., Lange B., Seibel K., Schäfer H., Walder M., Friedrich N., Ehrhardt D., Schönfeld F., Zech G., and Böhm M. Monolithically integrated micro flow sensor for lab-on-chip applications. Microelectron. Eng. 78-79 (2005) 164-170
5. Nguyen N.T., Schubert S., Richter S., and Dötzel W. Hybrid-assembled micro dosing system using silicon-based micropump/valve and mass flow sensor. Sens. Actuators A 69 (1998) 85-91
6. Rasmussen A., Mavriplis C., Zaghloul M.E., Mikulchenko O., and Mayaram K. Simulation and optimization of a microfluidic flow sensor. Sens. Actuators A 88 (2001) 121-132
7. Fürjes P., Légrádi G., Dücsó C., Aszódi A., and Bársony I. Thermal characterisation of a direction dependent flow sensor. Sens. Actuators A 115 (2004) 417-423
8. Mayer F., Salis G., Funk J., Paul O., and Baltes H. Scaling of thermal CMOS gas flow microsensors: experiment and simulation. Proceedings of MEMS '96, vol. 11-15. San Diego, CA (1996) 116-121
9. Nguyen N.T., Bochnia D., Kiehnscherf R., and Dötzel W. Investigation of forced convection in microfluid systems. Sens. Actuators A 55 (1996) 49-55
10. Schmid U. A robust flow sensor for high pressure automotive applications. Sens. Actuators A 97-98 (2002) 253-263
11. Sabaté N., Santander J., Fonseca L., Gràcia I., and Cané C. Multi-range silicon micromachined flow sensor. Sens. Actuators A 110 (2004) 282-288
12. Baltes H., Paul O., and Brand O. Micromachined thermally based CMOS microsensors. Proc. IEEE 86 (1998) 1660-1678
13. Lammerink T.S.J., Tas N.R., Elvenspoek M., and Fluitman J.H.J. Micro-liquid flow sensor. Sens. Actuators A 37-38 (1993) 45-50
14. Bruschi P., Diligenti A., Navarrini D., and Piotto M. A double heater integrated gas flow sensor with thermal feedback. Sens. Actuators A 123-124 (2005) 210-215
15. Bruschi P., Piotto M., and Barillaro G. Effects of gas type on the sensitivity and transition pressure of integrated thermal flow sensors. Sens. Actuators A 132 (2006) 182-187
16. S.P. Grisnik, Measurements of Xenon viscosity as a function of low temperature and pressure, NASA/TM-208409, 1998.
17. Nguyen N.T., Huang X.Y., and Toh K.C. Thermal flow sensor for ultra-low velocities based on printed circuit board technology. Meas. Sci. Technol. 12 (2001) 2131-2136
18. Mayer F., Paul O., and Bates H. Influence of design geometry and packaging on the response of thermal CMOS flow sensors. Proceedings of Transducers '95-Eurosensors IX. Stockholm, Sweden (1995) 528-531
19. de Bree H.E., Jansen H.V., Lammerink T.S.J., Krijnen G.J.M., and Elvenspoek M. Bi-directional fast flow sensor with a large dynamic range. J. Micromech. Microeng. 9 (1999) 186-189