Effects of gas type on the sensitivity and transition pressure of integrated thermal flow sensors

Sensors and Actuators, A: Physical

Volumn 132, Issue 1 SPEC. ISS., 2006, Pages 182-187

  Bruschi, P ^a   Piotto, M ^b   Barillaro, G ^a  

^a Dipartimento di Ingegneria dell'Informazione   (Italy)

^b CNR   (Italy)

Author keywords

Flow sensors; Gas type dependence; Integrated sensors; Pressure dependence

Indexed keywords

CALORIMETERS; INTEGRATED CIRCUITS; MICROELECTRONICS; PRESSURE EFFECTS; RESPONSE TIME (COMPUTER SYSTEMS);

FLOW SENSORS; GAS TYPE DEPENDENCE; INTEGRATED SENSORS; PRESSURE DEPENDENCE;

SENSORS;

EID: 33751120466     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.03.021     Document Type: Article

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