Reinforced piezoresistive pressure sensor for ocean depth measurements

Sensors and Actuators, A: Physical

Volumn 142, Issue 1, 2008, Pages 111-117

  Aravamudhan, Shyam ^a   Bhansali, Shekhar ^a  

^a University of South Florida   (United States)

Author keywords

Double diaphragm; MEMS; Wheatstone bridge

Indexed keywords

BATHYMETRY; DIAPHRAGMS; ELECTRIC CONDUCTIVITY; PIEZOELECTRIC MATERIALS; TSUNAMIS;

DOUBLE DIAPHRAGM; PRESSURE CAPABILITY; TEMPERATURE COMPENSATION; WHEATSTONE BRIDGE;

PRESSURE SENSORS;

EID: 38849142508     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.04.036     Document Type: Article

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