Fish & chips: Single chip silicon MEMS CTDL salinity, temperature, pressure and light sensor for use in fisheries research

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 303-306

  Hyldgard A ^a   Hansen, O ^a   Thomsen, E V ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRODES; ION IMPLANTATION; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRICITY; PLATINUM; SALINITY MEASUREMENT; SENSORS; SILICON; THERMISTORS;

PIEZO RESISTIVE SENSORS; PRESSURE SENSORS; SINGLE-CHIP SILICON MEMS CTDL MULTI SENSORS; TEMPERATURE SENSORS;

MICROPROCESSOR CHIPS;

EID: 26844479209     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. E. L. Lewis, "The Practical Salinity Scale 1978 and its antecedents", IEEE Journal of Oceanic Engineering, OE4:3-8, 1980
2. C. Pedersen, S. T. Jespersen, K. W. Jacobsen, J. P. Krog, C. Christensen, and E. V. Thomsen, "Highly Reliable O-ring Packaging Concept for MEMS Pressure Sensors", Sensors and Actuators A 115 (2004) 617-627
3. M. I. Montenegro et al, "Microelectrodes: Theory and applications", Kluwer Academic Publishers
4. E. Hunter et al, "Geolocation of free-ranging fish on the European continental shelf as determined from environmental variables", Marine Biology, 142-3 (2003), pp 601-609