MEMS based Conductivity-temperature-depth (CTD) sensor for harsh oceanic environment

Proceedings of MTS/IEEE OCEANS, 2005

Volumn 2005, Issue , 2005, Pages 1785-1789

  Aravamudhan, S ^a   Bhat, S ^a   Bethala, B ^a   Bhansali, S ^a   Langebrake, L ^b  

^a University of South Florida   (United States)

^b UNIVERSITY OF SOUTH FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; DOPING (ADDITIVES); GOLD; MEMS; PRESSURE SENSORS; SILICON SENSORS; TEMPERATURE SENSORS;

CONDUCTIVITY-TEMPERATURE-DEPTH (CTD) SENSOR; MARINE ENVIRONMENT; PIEZORESISTIVE PRESSURE SENSOR;

OCEANOGRAPHY;

EID: 33947097989     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OCEANS.2005.1640015     Document Type: Conference Paper

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