Combined differential and static pressure sensor based on a double-bridged structure

IEEE Sensors Journal

Volumn 5, Issue 3, 2005, Pages 446-454

  Pedersen, Casper ^a   Jespersen, Simon T ^b   Krog, Jens Peter ^a   Christensen, Carsten ^a   Thomsen, Erik V ^b  

^a Grundfos DK AS   (Denmark)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Combined pressure sensors; Double bridge; Finite element (FE); Microelectromechanical system (MEMS); O ring; Piezoresistive; Silicon; Stress; Wheatstone

Indexed keywords

ELECTRONICS PACKAGING; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROPROCESSOR CHIPS; OPTIMIZATION; PIEZOELECTRIC DEVICES; SILICON; SILICON WAFERS; STRESS ANALYSIS;

COMBINED PRESSURE SENSORS; DOUBLE-BRIDGE; O-RING; PIEZORESISTIVE; WHEATSTONE;

SENSORS;

EID: 19944403578     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2005.845199     Document Type: Article

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