High-resolution pressure sensor for photo acoustic gas detection

Sensors and Actuators, A: Physical

Volumn 132, Issue 1 SPEC. ISS., 2006, Pages 207-213

  Schjolberg Henriksen K ^a   Wang, D T ^a   Rogne, H ^a   Ferber, A ^a   Vogl, A ^a   Moe, S ^a   Bernstein, R ^a   Lapadatu, D ^b   Sandven, K ^a   Brida, S ^c  

^a SINTEF ICT   (Norway)

^b SensoNor   (Norway)

^c Esterline Sensors Group   (France)

Author keywords

CO2; Photo acoustic gas sensor; Pressure sensor

Indexed keywords

CARBON DIOXIDE; FABRICATION; GAS DETECTORS; PHOTOACOUSTIC EFFECT; PRESSURE MEASUREMENT; THICKNESS MEASUREMENT;

ANODIC BONDING; CO2; PHOTO ACOUSTIC GAS SENSORS; PRESSURE SENSORS;

SENSORS;

EID: 33751117798     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.02.019     Document Type: Article

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