Improvement of pressure-sensor performance and process robustness through reinforcement of the membrane edges

Sensors and Actuators, A: Physical

Volumn 67, Issue 1-3, 1998, Pages 138-141

  Gotz A ^a   Campabadal, F ^a   Cane C ^a  

^a CSIC   (Spain)

Author keywords

Breaking strength; Piezoresistive pressure sensors

Indexed keywords

FINITE ELEMENT METHOD; PIEZOELECTRIC DEVICES; PRESSURE MEASUREMENT; PRESSURE TRANSDUCERS;

PRESSURE GAGES;

EID: 0043286550     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01780-9     Document Type: Article

References (4)

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