Embedded structure of silicon monoxide in SiO 2 films

Applied Surface Science

Volumn 254, Issue 8, 2008, Pages 2534-2539

  Chiba, Kiyoshi ^a   Takenaka, Yoshihito ^a  

^a TOKUSHIMA BUNRI UNIVERSITY   (Japan)

Author keywords

Secondary ion species; Silicon suboxides; SiO x films; Time of flight secondary ion mass spectrometry; X ray photoelectron spectroscopy

Indexed keywords

OXIDE FILMS; SECONDARY ION MASS SPECTROMETRY; VACUUM EVAPORATION; X RAY PHOTOELECTRON SPECTROSCOPY;

EMBEDDED STRUCTURES; GLASS NETWORKS; SILICON MONOXIDES;

SILICA;

EID: 38749089108     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.09.089     Document Type: Article

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