Characterization of ion species of silicon oxide films using positive and negative secondary ion mass spectra

Applied Surface Science

Volumn 253, Issue 2, 2006, Pages 412-416

  Chiba, Kiyoshi ^a   Nakamura, Shun ^a  

^a TOKUSHIMA BUNRI UNIVERSITY   (Japan)

Author keywords

Secondary ion species; Silicon oxides; Time of flight secondary ion mass spectrometry

Indexed keywords

INTERFACES (MATERIALS); SECONDARY ION MASS SPECTROMETRY; SILICA; THIN FILMS;

SECONDARY ION SPECIES; SILICON OXIDES; TIME-OF-FLIGHT SECONDARY ION MASS SPECTROMETRY;

ION SOURCES;

EID: 33845432730     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.12.118     Document Type: Article

References (18)

1. Douglas M., and Chen P. Surf. Interface Anal. 26 (1998) 984
2. Hoshi T., Zhanping L., Tozu M., and Oiwa R. J. Surf. Anal. 5 (1999) 132
3. Ferrari S., Perego M., and Fanciulli M. Appl. Surf. Sci. 203-204 (2003) 52
4. Allali H., Nsouli B., Thomas J.P., Szymczak W., and Wittmaack K. Nucl. Instrum. Methods B 90 (1994) 501
5. Bersani M., Giubertoni D., Barozzi M., EIacob E., Vanzetti L., Anderle M., Lazzeri P., Crivelli B., and Zanderigo F. Appl. Surf. Sci. 203-204 (2003) 281
6. Perego M., Ferrari S., Spiga S., Bonera E., Fanciulli M., and Soncini V. Appl. Phys. Lett. 82 (2003) 121
7. Stevels J. Philips Tech. Rev. 22 (1960) 300
8. Okorn-Schmidt H.K. IBM J. Res. Dev. 43 (1999) 351
9. Ventra M.D., Evoy S., and Heflin J.R. Introduction to Nanoscale Science and Technology (2004), Kluwer Academic Publishers, Boston
10. Chwang A.B., Rothman M.A., Mao S.Y., Hewitt R.H., Weaver M.S., Silvernail J.A., Rajan K., Hack M., Brown J.J., Chu X., Moro L., Krajewski T., and Rutherford N. Appl. Phys. Lett. 83 (2003) 413
11. Langowski H.-C. 46th Annual Technical Conference Proceedings of the Society of Vacuum Coaters (2003) 559
12. Herzinger C.M., Johs B., McGahan W.A., Woollam J.A., and Paulson W. J. Appl. Phys. 83 (1998) 3323
13. Irene E.A. Thin Solid Films 233 (1993) 96
14. Aspen D.E., and Theeten J.B. Phys. Rev. Lett. 43 (1979) 1046
15. Briggs D. Surf. Interface Anal. 15 (1990) 734
16. van Ooij W.J., and Brinkhuis R.H.G. Surf. Interface Anal. 11 (1988) 430
17. Slodzian G. Surf. Sci. 48 (1975) 161
18. Plog C., Wiedmann L., and Benninghoven A. Surf. Sci. 67 (1977) 565