SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Surface and Coatings Technology

Volumn 99, Issue 1-2, 1998, Pages 147-160

Techniques for the sputtering of optimum indium-tin oxide films on to room-temperature substrates

(4) Danson, N a Safi, I a Hall, G W a Howson, R P a

a LOUGHBOROUGH UNIVERSITY (United Kingdom)

Author keywords

ITO; Reactive sputtering; Transport conducting coatings

Indexed keywords

EID: 0001565909 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(97)00436-2 Document Type: Article

Times cited : (47)

References (16)

1
- 0021473711
- US Patent 4 166 784, 1979
- J. Chapin, C.R. Condon, US Patent 4 166 784, 1979; S. Schiller, U. Heisig, G. Beister, K. Steinfelder, J. Strumpfel, Chs. Korndorfer, T. Selber, Thin Solid Films 118 (1984) 255.
- Chapin, J.¹ Condon, C.R.²

2
- 0021473711
- J. Chapin, C.R. Condon, US Patent 4 166 784, 1979; S. Schiller, U. Heisig, G. Beister, K. Steinfelder, J. Strumpfel, Chs. Korndorfer, T. Selber, Thin Solid Films 118 (1984) 255.
- (1984) Thin Solid Films , vol.118 , pp. 255
- Schiller, S.¹ Heisig, U.² Beister, G.³ Steinfelder, K.⁴ Strumpfel, J.⁵ Korndorfer, Chs.⁶ Selber, T.⁷

3
- 0021192551
- S. Schiller, G. Beister, W. Sieber, Thin Solid Films 111 (1984) 259.
- (1984) Thin Solid Films , vol.111 , pp. 259
- Schiller, S.¹ Beister, G.² Sieber, W.³

4
- 84943750081
- B. Window, N. Savvides, J. Vac. Sci. Technol. A 4 (1986) 196.
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 196
- Window, B.¹ Savvides, N.²

5
- 21144461847
- H.K. Pulker, J. Vac. Sci. Technol. A 10 (1992) 1669.
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 1669
- Pulker, H.K.¹

6
- 0042308507
- S.L. Rohde, A.J. Nelson, A. Mason, W.D. Sproul, J. Vac. Sci. Technol. A 10 (1992) 1897.
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 1897
- Rohde, S.L.¹ Nelson, A.J.² Mason, A.³ Sproul, W.D.⁴

7
- 0023978719
- A.G. Spencer, R.P. Howson, R.W. Lewin, Thin Solid Films 138 (1988) 141.
- (1988) Thin Solid Films , vol.138 , pp. 141
- Spencer, A.G.¹ Howson, R.P.² Lewin, R.W.³

8
- 0001169314
- R.P. Howson, A.G. Spencer, K. Oka, R.W. Lewin, J. Vac. Sci. Technol. A 7 (1989) 1230.
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 1230
- Howson, R.P.¹ Spencer, A.G.² Oka, K.³ Lewin, R.W.⁴

9
- 0020477687
- M.I. Ridge, R.P. Howson, Thin Solid Films 96 (1982) 121.
- (1982) Thin Solid Films , vol.96 , pp. 121
- Ridge, M.I.¹ Howson, R.P.²

10
- 0001169314
- R.P. Howson, A.G. Spencer, K. Oka, R.W. Lewin, J. Vac. Sci. Technol. A 7 (1989) 1230.
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 1230
- Howson, R.P.¹ Spencer, A.G.² Oka, K.³ Lewin, R.W.⁴

11
- 0002550187
- E.O. Auciello, J. Englemann (Eds.), NATO/ASI Series, Kluwer, Dordrecht
- R.P. Howson, in: E.O. Auciello, J. Englemann (Eds.), Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Fundamentals and Applications, NATO/ASI Series, Kluwer, Dordrecht, 1993.
- (1993) Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Fundamentals and Applications
- Howson, R.P.¹

12
- 4243736552
- R.P. Howson, Nucl. Instr. Meth. Phys. Res. B 121 (1997) 102.
- (1997) Nucl. Instr. Meth. Phys. Res. B , vol.121 , pp. 102
- Howson, R.P.¹

13
- 21144478824
- J.P. Lehan, R.B. Sargent, R.E. Klinger, J. Vac. Sci. Technol. A 10 (1992) 3401.
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 3401
- Lehan, J.P.¹ Sargent, R.B.² Klinger, R.E.³

14
- 21144474237
- M. Scherer, J. Schmitt, R. Latz, M. Schanz, J. Vac. Sci. Technol. A 10 (1992) 1772.
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 1772
- Scherer, M.¹ Schmitt, J.² Latz, R.³ Schanz, M.⁴

15
- 0026866766
- H. Czterrnastek, A. Brudnik, M. Jachimowski, E. Kolawa, J. Phys. D: Appl. Phys. 25 (1992) 865.
- (1992) J. Phys. D: Appl. Phys. , vol.25 , pp. 865
- Czterrnastek, H.¹ Brudnik, A.² Jachimowski, M.³ Kolawa, E.⁴

16
- 0040771894
- J.W. Orton, M.J. Powell, Rep. Prog. Phys. 43 (1980) 1263.
- (1980) Rep. Prog. Phys. , vol.43 , pp. 1263
- Orton, J.W.¹ Powell, M.J.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.