RADIATION-INDUCED MICROLITHOGRAPHIC EFFECTS IN AMORPHOUS CHALCOGENIDE FILMS.

Proceedings - The Electrochemical Society

Volumn 82, Issue 9/-, 1982, Pages 129-145

  Chopra, K L ^a   Malhotra, L K ^a   Harshvardhan, K Solomon ^a   Singh, Bhanwar ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ETCHING OF SELENIUM-GERMANIUM FILMS; ELECTRON BEAM EFFECTS; ION BEAM EFFECTS; LITHOGRAPHIC APPLICATIONS; OPTICAL DENSIFICATION; PHOTOCONTRACTION OF DEPOSITED FILMS;

PHOTORESISTS;

EID: 0020267746     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)