Novel yield model for integrated circuits with clustered defects

Expert Systems with Applications

Volumn 34, Issue 4, 2008, Pages 2334-2341

  Tong, Lee Ing ^a   Chao, Li Chang ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Clustered defects; General regression neural network; IC; Pattern; Yield model

Indexed keywords

CLUSTER ANALYSIS; COMPUTER SIMULATION; MATHEMATICAL MODELS; NEURAL NETWORKS; POISSON DISTRIBUTION; SILICON WAFERS;

CLUSTERED DEFECTS; GENERAL REGRESSION NEURAL NETWORK; YIELD MODELS;

INTEGRATED CIRCUITS;

EID: 38649091653     PISSN: 09574174     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.eswa.2007.03.013     Document Type: Article

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