Simulation-based semiconductor chip yield model incorporating a new defect cluster index

Microelectronics Reliability

Volumn 39, Issue 4, 1999, Pages 451-456

  Jun, Chi Hyuck ^a   Hong, Yushin ^a   Kim, Soo Young ^a   Park, Kwang Su ^a   Park, Hangyeob ^b  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DEFECTS; REGRESSION ANALYSIS; SEMICONDUCTOR DEVICE MODELS;

DEFECT CLUSTER INDEX; SIMULATION-BASED YIELD PREDICTION MODELS;

INTEGRATED CIRCUITS;

EID: 0032668231     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(99)00026-8     Document Type: Article

References (11)

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